| Application no. and date | 14781871.0 (espacenet) (Federated) (European Patent Register), 20141007 | | Patent/reg. no. and date | DK/EP 3055076, 20230607 | | Publication date | 20160817 | | Priority no. and date | EP 13187623, 20131007 | | EP pub. no. and date |
EP 3055076 20160817 | | Effective date | | | Applicant/owner | Europlasma nv, Industriepark
De Bruwaan 5D
9700 Oudenaarde, BE | | Applicant ref. no. | | | Inventor | LEGEIN, Filip, Europlasma NV
Industriepark De Bruwaan 5D
B-9700 Oudenaarde, BE,
ROGGE, Eva, Europlasma NV
Industriepark De Bruwaan 5D
B-9700 Oudenaarde, BE,
SERCU, Marc, Europlasma NV
Industriepark De Bruwaan 5D
B-9700 Oudenaarde, BE | | Representative | | | Opponent | | | IPC Class | C23C 16/50 (2006.01) , H01J 37/32 (2006.01) , B05D 1/00 (2006.01) | | Title | IMPROVED WAYS TO GENERATE PLASMA IN CONTINUOUS POWER MODE FOR LOW PRESSURE PLASMA PROCESSES | | Int. application no. | EP2014071466 | | Int. publication no. | WO2015052199 | | Related patent (certificate) | | | Status | Enhedspatent registreret | | Pædiatrisk forlængelse | - | | Udløbsdato for pædiatrisk forlængelse | - |
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