Application no. and date | 20736296.3 (espacenet) (Federated) (European Patent Register), 20200629 | Patent/reg. no. and date | DK/EP 3997519, 20231129 | Publication date | 20220518 | Priority no. and date | NO 20190876, 20190711 | EP pub. no. and date |
EP 3997519 20220518 | Effective date | | Applicant/owner | VISITECH AS, P.O.Box 616
3003 Drammen, NO | Applicant ref. no. | | Inventor | KIRKHORN, Endre, Nyborgveien 1
3031 Drammen, NO, ALMEDAL, Roy, Karjolveien 28
3531 Krokkleiva, NO, TAFJORD, ÿyvind, Båtsmannsveien 32
3150 Tolvsrød, NO, JÿRGENSEN, Trond, Rosenkranzgt. 39
3018 Drammen, NO | Representative | | Opponent | | IPC Class | G03F 7/20 (2006.01) , G03F 9/00 (2006.01) | Title | REAL TIME REGISTRATION IN LITOGRAPHY SYSTEM | Int. application no. | EP2020068286 | Int. publication no. | WO2021004826 | Related patent (certificate) | | Status | Enhedspatent registreret | Pædiatrisk forlængelse | - | Udløbsdato for pædiatrisk forlængelse | - |
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