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Application no. and date20736296.3 (espacenet)  (Federated)  (European Patent Register), 20200629
Patent/reg. no. and dateDK/EP 3997519, 20231129
Publication date20220518
Priority no. and dateNO 20190876, 20190711
EP pub. no. and date EP 3997519 20220518
Effective date
Applicant/ownerVISITECH AS, P.O.Box 616
3003 Drammen, NO
Applicant ref. no.
InventorKIRKHORN, Endre, Nyborgveien 1
3031 Drammen, NO,
ALMEDAL, Roy, Karjolveien 28
3531 Krokkleiva, NO,
TAFJORD, ÿyvind, Båtsmannsveien 32
3150 Tolvsrød, NO,
JÿRGENSEN, Trond, Rosenkranzgt. 39
3018 Drammen, NO
Representative
Opponent
IPC ClassG03F 7/20 (2006.01) , G03F 9/00 (2006.01) 
TitleREAL TIME REGISTRATION IN LITOGRAPHY SYSTEM
Int. application no.EP2020068286
Int. publication no.WO2021004826
Related patent (certificate)
StatusEnhedspatent registreret
Pædiatrisk forlængelse-
Udløbsdato for pædiatrisk forlængelse-

 
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