| Ansøgningsnr. og dato | 20194073.1 (espacenet) (Federated) (European Patent Register), 20200902 | | Patent/reg.nr. og dato | DK/EP 3792692, 20250709 | | Tilgængelighedsdato | 20210317 | | Prioritetsnr. og dato | JP 2019166813, 20190913 | | EP publ. nr. og dato |
EP 3792692 20210317 | | Løbedag | | | Ansøger/indehaver | Shin-Etsu Chemical Co., Ltd., 6-1, Ohtemachi 2-chome
Chiyoda-ku
Tokyo, JP | | Ansøgers ref. nr. | | | Opfinder | KOSAKA, Takuro, c/o New Functional Materials Research Center,
Shin-Etsu Chemical Co., Ltd.,
28-1, Nishi Fukushima,
Kubiki-ku,
Joetsu-shi, Niigata, JP,
INAZUKI, Yukio, c/o New Functional Materials Research Center,
Shin-Etsu Chemical Co., Ltd.,
28-1, Nishi Fukushima,
Kubiki-ku,
Joetsu-shi, Niigata, JP,
KANEKO, Hideo, c/o New Functional Materials Research Center,
Shin-Etsu Chemical Co., Ltd.,
28-1, Nishi Fukushima,
Kubiki-ku,
Joetsu-shi, Niigata, JP,
TERASAWA, Tsuneo, c/o New Functional Materials Research Center,
Shin-Etsu Chemical Co., Ltd.,
28-1, Nishi Fukushima,
Kubiki-ku,
Joetsu-shi, Niigata, JP | | Fuldmægtig | | | Interessent på tilknyttet sag | | | IPC-Klasse | G03F 1/24 (2012.01) , G03F 1/38 (2012.01) , G03F 1/42 (2012.01) , G03F 1/50 (2012.01) , G03F 1/84 (2012.01) | | Titel/benævnelse | METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASK | | Internationalt ansøgningsnr. | | | Internationalt publ. nr. | | | Relateret sag (certifikat) | | | Status | Enhedspatent registreret | | Pædiatrisk forlængelse | - | | Udløbsdato for pædiatrisk forlængelse | - |
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